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		<id>http://www.colloquiam.com/wd/index.php?action=history&amp;feed=atom&amp;title=Faraci_et_al_2022a</id>
		<title>Faraci et al 2022a - Revision history</title>
		<link rel="self" type="application/atom+xml" href="http://www.colloquiam.com/wd/index.php?action=history&amp;feed=atom&amp;title=Faraci_et_al_2022a"/>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;action=history"/>
		<updated>2026-05-11T03:05:39Z</updated>
		<subtitle>Revision history for this page on the wiki</subtitle>
		<generator>MediaWiki 1.27.0-wmf.10</generator>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=262846&amp;oldid=prev</id>
		<title>Move page script: Move page script moved page Faraci et al 1970a to Faraci et al 2022a</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=262846&amp;oldid=prev"/>
				<updated>2022-11-25T15:06:42Z</updated>
		
		<summary type="html">&lt;p&gt;Move page script moved page &lt;a href=&quot;/public/Faraci_et_al_1970a&quot; class=&quot;mw-redirect&quot; title=&quot;Faraci et al 1970a&quot;&gt;Faraci et al 1970a&lt;/a&gt; to &lt;a href=&quot;/public/Faraci_et_al_2022a&quot; title=&quot;Faraci et al 2022a&quot;&gt;Faraci et al 2022a&lt;/a&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;tr style='vertical-align: top;' lang='en'&gt;
				&lt;td colspan='1' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan='1' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;Revision as of 15:06, 25 November 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan='2' style='text-align: center;' lang='en'&gt;&lt;div class=&quot;mw-diff-empty&quot;&gt;(No difference)&lt;/div&gt;
&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</summary>
		<author><name>Move page script</name></author>	</entry>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261278&amp;oldid=prev</id>
		<title>JSanchez: JSanchez moved page Draft Sanchez Pinedo 794163426 to Faraci et al 1970a</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261278&amp;oldid=prev"/>
				<updated>2022-11-23T09:25:10Z</updated>
		
		<summary type="html">&lt;p&gt;JSanchez moved page &lt;a href=&quot;/public/Draft_Sanchez_Pinedo_794163426&quot; class=&quot;mw-redirect&quot; title=&quot;Draft Sanchez Pinedo 794163426&quot;&gt;Draft Sanchez Pinedo 794163426&lt;/a&gt; to &lt;a href=&quot;/public/Faraci_et_al_1970a&quot; class=&quot;mw-redirect&quot; title=&quot;Faraci et al 1970a&quot;&gt;Faraci et al 1970a&lt;/a&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;tr style='vertical-align: top;' lang='en'&gt;
				&lt;td colspan='1' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan='1' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;Revision as of 09:25, 23 November 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan='2' style='text-align: center;' lang='en'&gt;&lt;div class=&quot;mw-diff-empty&quot;&gt;(No difference)&lt;/div&gt;
&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</summary>
		<author><name>JSanchez</name></author>	</entry>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261277&amp;oldid=prev</id>
		<title>JSanchez at 09:25, 23 November 2022</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261277&amp;oldid=prev"/>
				<updated>2022-11-23T09:25:04Z</updated>
		
		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='en'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;Revision as of 09:25, 23 November 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l6&quot; &gt;Line 6:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 6:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;== Abstract ==&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;== Abstract ==&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pdf&amp;gt;Media:Draft_Sanchez Pinedo_794163426995_abstract.pdf&amp;lt;/pdf&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&amp;lt;pdf&amp;gt;Media:Draft_Sanchez Pinedo_794163426995_abstract.pdf&amp;lt;/pdf&amp;gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;== Full Paper ==&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&amp;lt;pdf&amp;gt;Media:Draft_Sanchez Pinedo_794163426995_paper.pdf&amp;lt;/pdf&amp;gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>JSanchez</name></author>	</entry>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261275&amp;oldid=prev</id>
		<title>JSanchez at 09:25, 23 November 2022</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261275&amp;oldid=prev"/>
				<updated>2022-11-23T09:25:01Z</updated>
		
		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='en'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;Revision as of 09:25, 23 November 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l3&quot; &gt;Line 3:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 3:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The development and optimization of Micro electro-mechanical systems (MEMS) devices, due to their small size scale, require testing and precise characterization. As an example, over etch, which is the deviation between the designed masks and the effective dimensions of the suspended parts, strongly influences the performances of MEMS; therefore, to predict the correct functioning of the device its actual value must be carefully identified. In this work, we propose an efficient, time-saving tool to identify fabrication imperfections in MEMS devices. In particular, we replace the complex geometry of a MEMS mechanical filter with an equivalent homogeneous medium, whose linear-elastic effective properties are evaluated employing twoscale asymptotic homogenization and we identify the over etch by minimizing the relative error between experimental data and corresponding predictions obtained for different combinations of over etch.&lt;/div&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;The development and optimization of Micro electro-mechanical systems (MEMS) devices, due to their small size scale, require testing and precise characterization. As an example, over etch, which is the deviation between the designed masks and the effective dimensions of the suspended parts, strongly influences the performances of MEMS; therefore, to predict the correct functioning of the device its actual value must be carefully identified. In this work, we propose an efficient, time-saving tool to identify fabrication imperfections in MEMS devices. In particular, we replace the complex geometry of a MEMS mechanical filter with an equivalent homogeneous medium, whose linear-elastic effective properties are evaluated employing twoscale asymptotic homogenization and we identify the over etch by minimizing the relative error between experimental data and corresponding predictions obtained for different combinations of over etch.&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;== Abstract ==&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&amp;lt;pdf&amp;gt;Media:Draft_Sanchez Pinedo_794163426995_abstract.pdf&amp;lt;/pdf&amp;gt;&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>JSanchez</name></author>	</entry>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261273&amp;oldid=prev</id>
		<title>JSanchez at 09:25, 23 November 2022</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261273&amp;oldid=prev"/>
				<updated>2022-11-23T09:25:00Z</updated>
		
		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table class=&quot;diff diff-contentalign-left&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;col class='diff-marker' /&gt;
				&lt;col class='diff-content' /&gt;
				&lt;tr style='vertical-align: top;' lang='en'&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan='2' style=&quot;background-color: white; color:black; text-align: center;&quot;&gt;Revision as of 09:25, 23 November 2022&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot; id=&quot;mw-diff-left-l1&quot; &gt;Line 1:&lt;/td&gt;
&lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 1:&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &amp;#160; &lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;==Summary==&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;td class='diff-marker'&gt;&amp;#160;&lt;/td&gt;&lt;td style=&quot;background-color: #f9f9f9; color: #333333; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #e6e6e6; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;tr&gt;&lt;td colspan=&quot;2&quot;&gt;&amp;#160;&lt;/td&gt;&lt;td class='diff-marker'&gt;+&lt;/td&gt;&lt;td style=&quot;color:black; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;The development and optimization of Micro electro-mechanical systems (MEMS) devices, due to their small size scale, require testing and precise characterization. As an example, over etch, which is the deviation between the designed masks and the effective dimensions of the suspended parts, strongly influences the performances of MEMS; therefore, to predict the correct functioning of the device its actual value must be carefully identified. In this work, we propose an efficient, time-saving tool to identify fabrication imperfections in MEMS devices. In particular, we replace the complex geometry of a MEMS mechanical filter with an equivalent homogeneous medium, whose linear-elastic effective properties are evaluated employing twoscale asymptotic homogenization and we identify the over etch by minimizing the relative error between experimental data and corresponding predictions obtained for different combinations of over etch.&lt;/ins&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>JSanchez</name></author>	</entry>

	<entry>
		<id>http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261272&amp;oldid=prev</id>
		<title>JSanchez: Created blank page</title>
		<link rel="alternate" type="text/html" href="http://www.colloquiam.com/wd/index.php?title=Faraci_et_al_2022a&amp;diff=261272&amp;oldid=prev"/>
				<updated>2022-11-23T09:24:58Z</updated>
		
		<summary type="html">&lt;p&gt;Created blank page&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;&lt;/div&gt;</summary>
		<author><name>JSanchez</name></author>	</entry>

	</feed>